offsrt hologtam

Hindle testing of the off-axis convex ashpere surface;

离轴凸非球面的Hindle检测

Parabolic Mirror with Large off-axis Fabrication;

大离轴量抛物面镜的加工

A Novel Design of Off-axis Three-mirror Reflective Optical System;

一种新型离轴三反式光学系统的设计

Vectorial Hopkins formulation depending on angles of off-axis illumination;

离轴照明下依赖于入射角度的矢量霍普金斯公式

Process window improvement is presented due to off-axis illumination(OAI) and phase-shifting mask(PSM) for 193 nm immersion lithography at 65 nm node.

研究了交替型相移掩模及离轴照明对65nm分辨率ArF浸没式光刻的影响。

By using software for lithography simulation,the simulation results of lines with different width and pitch before and after adding SRAF are compared with that without off-axis illumination and sub-resolution assistance feature.

讨论了亚波长光刻条件下的离轴照明和次分辨率辅助图形两种分辨率的增强技术,分析了两种技术的原理,利用光刻模拟软件,针对不同线宽的稀疏线条,对添加次分辨率辅助图形前后的光刻仿真结果进行了对比。

The off-boresight drive signal is a kind of modulated signal with the charaeteristics of low frequency,small amplitude and liable to be interferenced.

离轴驱动信号是一种频率低、幅值小、易受干扰的调制信号,在信号检测中通常是测试的难点。