MOEMS

A design of micro-machining based digital micro-optical-electro-mechanical systems(MOEMS) variable optical attenuator was reported for digitally adjusting optical attenuation.

为了实现数字化电控调节光衰减量,提出一种电磁线圈驱动的微光机电系统(MOEMS)可调光衰减器,该衰减器主要通过电磁力步进驱动微加工齿轮/齿条机构,带动偏心轮,从而移动挡光片调节光衰减量,实现单模光纤中光传输功率的数字化电控调节。

As an important part of MOEMS, reflection mode MOEMS has emerged as a research area developing at full speed.

反射式微光机电系统是微光机电系统中的重要组成部分,近年来得到了较快的发展。

Two-dimensional scanning mirror is a new kind of deflection scanning device based on micro-optical-electro-mechanical system (MOEMS) technology, which has great advantages over the conventional scanning mechanisms with small volume, low power consumption and high scanning frequency.

微型二维扫描镜是一种基于微光机电系统(MOEMS)技术的新型偏转扫描装置,与传统扫描装置相比具有体积小、功耗低、扫描频率高等优点。

An GaAs-based micro-opto-electro-mechanical system(MOEMS)cantilever tunable light emitting diode was presented.

采用微机械表面加工技术,成功设计并研制出具有GaAs基微光机电系统(MOEMS)悬臂梁结构的可调谐微腔发光二极管。

A Testing Method for a MOEMS Optical Switch Using CCD;

采用CCD技术的微型光机电系统光开关测试方法

Applications of MOEMS in Optical Communication;

微光电机械系统在光通信中的应用

55 μm MOEMS wavelength tunable filters are introduced,and the optical and electromechanical properties are simulated by using matrix transmittance theory and a electric-mechanical model of cantilever.

55μm微光电机械系统(MOEMS)波长可调谐滤波器的光学和电学特性进行了深入的对比分析和研究。

The Introduction of Novel Materials That Enable Temporary Bonding, Front-side Etch Protection, and MOEMS Packaging;

最后,介绍了高透明高折射材料,这些材料用在高亮度发光二极管(HB-LED)和微光电机械系统(MOEMS)中,可以降低由封装引起的光损耗。